Chapter 6: MOS Capacitors

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6.1. Introduction

The primary reason to study the Metal-Oxide-Silicon (MOS) capacitor is to understand the principle of operation as well as the detailed analysis of the Metal-Oxide-Silicon Field Effect Transistor (MOSFET). In this chapter, we introduce the MOS structure and its four different modes of operation, namely accumulation, flatband, depletion and inversion. We then consider the flatband voltage in more detail and present the MOS analysis based on the full depletion approximation. Finally, we analyze and discuss the MOS capacitance.

Boulder, December 2004