Chapter 6: MOS Capacitors

Previous chapterPrevious sectionSubsectionNext sectionNext chapter

Examples

Example 6.1  print file in PDF format

Calculate the flatband voltage of a silicon nMOS capacitor with a substrate doping Na = 1017 cm-3 and an aluminum gate (FM = 4.1 V). Assume there is no fixed charge in the oxide or at the oxide-silicon interface.

Example 6.2  print file in PDF format

Calculate the threshold voltage of a silicon nMOS capacitor with a substrate doping Na = 1017 cm-3, a 20 nm thick oxide (eox = 3.9 e0) and an aluminum gate (FM = 4.1 V). Assume there is no fixed charge in the oxide or at the oxide-silicon interface.

Example 6.3  print file in PDF format

Calculate the oxide capacitance, the flatband capacitance and the high frequency capacitance in inversion of a silicon nMOS capacitor with a substrate doping Na = 1017 cm-3, a 20 nm thick oxide (eox = 3.9 e0) and an aluminum gate (FM = 4.1 V).